High accuracy flowmeasurements in Semiconductor sectors

Equflow’'s PFA (Teflon) flow sensors have proven their accuracy in the production environment of Semiconductor ICs. Accurate measurement of photo-resist, developers, demineralized water and liquid dope substances are some of the possible applications in this field.

Apart from that, our flow sensors are capable of measuring acids and bases due to the fact that they are highly chemically resistant.

The sensor’s high resolution pulse output allows incredibly accurate dosing. Moreover, Equflow’s pricing enables a fast ROI.